Record-breaking attendance and phenomenal world-class speakers were just a couple of the highlights at this year’s LithoVision technical symposium, which focused on “A New Era of Manufacturing Integration."
It was a particularly special year as Nikon celebrates our 100th anniversary in 2017. The milestone LithoVision event featured an excellent agenda incorporating thought-provoking presentations by well-known presenters from across the industry, and special 100th anniversary promotions.
Figure 1A. Special 100th anniversary promotional items were distributed at the 2017 LithoVision symposium to help celebrate this milestone event (left image). Figure 1B. LithoVision attendees at the evening reception near the 100 year timeline banner that features key optical and precision technology milestones.
Returning to the City National Civic in downtown San Jose, CA, the annual symposium was held prior to the start of the SPIE Advanced Lithography conference. The successful event featured expert presenters from Huali Microelectronics Corporation, Intel, Tokyo Electron America, KLA-Tencor, Mentor Graphics, and Nikon. The afternoon session examined Litho Drivers/Requirements, Sub-5 nm Patterning, and Edge Placement Error Control, as well as other areas of critical importance to the industry. The evening event wrapped up with a poster session and an enjoyable reception in the lobby of the historic City National Civic Auditorium.
This year's technical session was very well received, and close to 99% of survey respondents replied that the LithoVision event as well as the presentation content either met or exceeded their expectations. LithoVision is consistently lauded for the great technical content and prestigious presenter line-up, and this year’s 100th anniversary celebration was an added highpoint at the event!
A number of the LithoVision presentations are featured in this edition of the Nikon eReview, and full event materials are available to customers upon request. If your company is interested in presenting at LithoVision 2018 or you have a suggestion regarding future events, please email us at email@example.com.