Rivaling the record audience from 2014, nearly 550 attendees joined Nikon for the 12th annual LithoVision technical symposium, which focused on “193i Extension to 7 nm and Beyond…” Representatives of more than 120 international companies throughout the industry attended this year’s event to learn about the leading semiconductor lithography drivers, challenges, and solutions.
Returning to the City National Civic, the 2015 event featured a keynote presentation on the Status of Lithography, by Dr. Harry Levinson of GLOBALFOUNDRIES and a panel discussion that spotlighted the challenges of future nodes from a variety of supplier and manufacturer perspectives. The evening was capped with an enjoyable poster session reception. As Dan Hutcheson of the Chip Insider® proclaimed “Nikon’s LithoVision 2015 delivered on what’s become its brand promise: The best half-day you can spend on lithography.”
 |
|
| Figure 1. LithoVision 2015 panelists discussed the challenges of future nodes. |
Highlights of a number of the LithoVision presentations are featured in this edition of the Nikon eReview, and full event materials are available to customers upon request. If your company is interested in presenting at LithoVision 2016 or you have a suggestion for a possible panel session topic, please email us at lithovision@nikon.com.