The Nikon eReview

The Nikon eReviewSpring 2018

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Industry Experts Focus on 193i Extension to 7 nm and Beyond at 12th Annual LithoVision Event

Rivaling the record audience from 2014, nearly 550 attendees joined Nikon for the 12th annual LithoVision technical symposium, which focused on “193i Extension to 7 nm and Beyond…” Representatives of more than 120 international companies throughout the industry attended this year’s event to learn about the leading semiconductor lithography drivers, challenges, and solutions.

Returning to the City National Civic, the 2015 event featured a keynote presentation on the Status of Lithography, by Dr. Harry Levinson of GLOBALFOUNDRIES and a panel discussion that spotlighted the challenges of future nodes from a variety of supplier and manufacturer perspectives. The evening was capped with an enjoyable poster session reception. As Dan Hutcheson of the Chip Insider® proclaimed “Nikon’s LithoVision 2015 delivered on what’s become its brand promise: The best half-day you can spend on lithography.”

2015-Happenings-Litho
Figure 1. LithoVision 2015 panelists discussed the challenges of future nodes.

Highlights of a number of the LithoVision presentations are featured in this edition of the Nikon eReview, and full event materials are available to customers upon request. If your company is interested in presenting at LithoVision 2016 or you have a suggestion for a possible panel session topic, please email us at lithovision@nikon.com.

Spring 2018 Edition

Featured
  • KLA-Tencor Research Scientist Emphasizes Stochastic Challenges at LithoVision 2018
Innovations & Enhancements
  • Nikon Experts Introduce NSR-S635E and iAS/LithoBooster Innovations at LithoVision and SPIE
News
  • IC Knowledge President Shares View of Semiconductor Landscape at Nikon Symposium
  • Intel Principal Engineer Highlights Overlay and Underlay Control Challenges in 193i Scaling
  • Seagate Technology Expert Details HAMR Process and Hard Disk Drive Litho Requirements
  • Applied Materials Executive Stresses Criticality of Materials-Enabled Solutions for EPE
  • The Latest Lithography Solutions for Advanced MEMS, LED, and Packaging Applications
Nikon Happenings
  • Nikon Precision Exhibiting at SEMICON West – July 10-12, 2018
  • Director of Nikon Research Corporation to Present at 25th Lithography Workshop – June 17-21, 2018
  • Nikon Corporation Recognized by Intel as a 2017 Achievement Award Winner for Technology
  • Nikon Implementing New Initiatives to Expand Customer Support Capabilities
  • Nikon is Committed to Women in Engineering and Next-Generation Engineering Initiatives
  • LithoVision Achieves 15 Year Milestone Event

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